专利名称:Isolation layer for CMOS image sensor and
fabrication method thereof
发明人:Kyung-Lak Lee申请号:US10882485申请日:20040630
公开号:US20050093088A1公开日:20050505
专利附图:
摘要:The present invention relates to an isolation layer for CMOS image sensor and afabrication method thereof, which are capable of improving a low light level characteristicof the CMOS image sensor. The isolation layer includes: a field insulating layer formed on
a predetermined portion of a substrate in the logic area to thereby define an active areaand a field area; a field stop ion implantation area formed on a predetermined portion ofthe substrate in the pixel area, the field stop ion implantation area having a
predetermined depth from a surface of the substrate to define an active area and a fieldarea; and an oxide layer deposited on a substrate surface corresponding to the field stopion implantation area.
申请人:Kyung-Lak Lee
地址:Ichon-shi KR
国籍:KR
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