专利名称:Coating apparatus and coating method发明人:Watanabe, Masaru,Masuda, Noboru申请号:EP981212.9申请日:19981117公开号:EP0926749A3公开日:20010228
专利附图:
摘要:A coating apparatus in which a first nozzle 1 and a second nozzle 2 are arrangedso as to oppose to each other on both side of a substrate 3 which travels continuously. Atip of the first nozzle has a support section 101 which is located upstream in the directionof the substrate 3 travells and has a shape of a curved surface protruding toward the
substrate to support a surface of the substrate 3 which is not coated, as well as adischarge section which is located downstream of the support section and includes a slit105, whereas the second nozzle 2 has a tip which is composed of at least a dischargesection in a similar shape of the first nozzle, at least a mechanism which adjusts a gapbetween the second nozzle and the substrate 3, and a mechanism which adjusts anembracing angle of the substrate 3 for the support section 101 of the first nozzle 1.
申请人:Matsushita Electric Industrial Co., Ltd.
地址:1006, Oaza-Kadoma Kadoma-shi, Osaka 571-8501 JP
国籍:JP
代理机构:Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
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