Electrically insulated pin lifter

专利名称：Electrically insulated pin lifter

发明人：ミハエル・ドゥア,リコ・ローナー,アードリア

ン・エッシェンモーザー,マルコ・アポローニ

申请号：JP20191438申请日：20190807公开号：JP2020036003A公开日：20200305

专利附图：

摘要：A pin lifting apparatus for moving and positioning a substrate to be processedin a process atmosphere region, which is electrically insulated. A pin lifting device includesa coupling portion having a coupling portion adapted to receive a support pin adapted to

contact and support a substrate, and extending from a normal position in which thecoupling portion is lowered. A drive unit having a drive unit 12 (motor) adapted tocooperate with the coupling by means of an adjustment member 14 (slide) so as to becontrollably adjustable to a defined support position and vice versa. . The pin liftingdevice also has an insulating component (consisting of a coupling element 21 and a fixingelement 22) arranged between the driving part and the coupling part for completelyelectrically insulating between the driving part and the coupling part. . [Selection] Fig. 2b

申请人：バット ホールディング アーゲー

地址：スイス国 ツェーハー ９４６９ ハーグ シーリストラーセ

国籍：CH

代理人：特許業務法人 津国

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