Adaptive optics apparatus that corrects aberration

专利名称：Adaptive optics apparatus that corrects

aberration of examination object and imagetaking apparatus including adaptive opticsapparatus

发明人：Saito, Kenichi申请号：EP10188407.0申请日：20101021公开号：EP2314204A1公开日：20110427

专利附图：

摘要：An adaptive optics apparatus includes first light modulating means arranged to

perform modulation in a polarization direction of one of two polarized light componentsin light emitted from a light source, changing means arranged to rotate the lightmodulated by the first light modulating means by 90 degrees, second light modulatingmeans arranged to modulate the light changed by the changing means in the

polarization direction, and irradiating means arranged to irradiate a measurement objectwith the light modulated by the second light modulating means.

申请人：Canon Kabushiki Kaisha

地址：30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP

国籍：JP

代理机构：Williamson, Brian

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