MULTIPLE DIMENSION POSITION SENSOR

专利名称：MULTIPLE DIMENSION POSITION SENSOR发明人：Martin Hosek,Christopher Hofmeister,John

F. Zettler,Alexander Krupyshev,SergeiSyssoev,Krzystof Majczak

申请号：US12163716申请日：20080627

公开号：US20090224750A1公开日：20090910

专利附图：

摘要：An apparatus including a controller, a workpiece transport in communicationwith the controller having a movable portion and a transport path, and a multi-

dimensional position measurement device including at least one field generating platenattached to the movable portion and at least one sensor group positioned along thetransport path and in communication with the controller, the field generating platen isconfigured for position measurement and propelling the movable portion, each sensor inthe at least one sensor group is configured to provide but one output signal along asingle axis corresponding to a sensed field generated by the at least one field generatingplaten and the controller is configured calculate a multi-dimensional position of themovable portion based on the but one output signal of at least one of the sensors in theat least one sensor group, the multi-dimensional position including a planar position anda gap measurement.

申请人：Martin Hosek,Christopher Hofmeister,John F. Zettler,AlexanderKrupyshev,Sergei Syssoev,Krzystof Majczak

地址：Lowell MA US,Hampstead NH US,Stow MA US,Chelmsford MA US,Townsend MAUS,Beverly MA US

国籍：US,US,US,US,US,US

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